JPH0234144B2 - - Google Patents

Info

Publication number
JPH0234144B2
JPH0234144B2 JP57030269A JP3026982A JPH0234144B2 JP H0234144 B2 JPH0234144 B2 JP H0234144B2 JP 57030269 A JP57030269 A JP 57030269A JP 3026982 A JP3026982 A JP 3026982A JP H0234144 B2 JPH0234144 B2 JP H0234144B2
Authority
JP
Japan
Prior art keywords
objective lens
particle beam
charged particle
scanning
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57030269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58147948A (ja
Inventor
Eiji Watanabe
Teruo Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57030269A priority Critical patent/JPS58147948A/ja
Publication of JPS58147948A publication Critical patent/JPS58147948A/ja
Publication of JPH0234144B2 publication Critical patent/JPH0234144B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57030269A 1982-02-26 1982-02-26 走査電子顕微鏡等の電子光学系 Granted JPS58147948A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57030269A JPS58147948A (ja) 1982-02-26 1982-02-26 走査電子顕微鏡等の電子光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57030269A JPS58147948A (ja) 1982-02-26 1982-02-26 走査電子顕微鏡等の電子光学系

Publications (2)

Publication Number Publication Date
JPS58147948A JPS58147948A (ja) 1983-09-02
JPH0234144B2 true JPH0234144B2 (en]) 1990-08-01

Family

ID=12298977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57030269A Granted JPS58147948A (ja) 1982-02-26 1982-02-26 走査電子顕微鏡等の電子光学系

Country Status (1)

Country Link
JP (1) JPS58147948A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
EP1049131B1 (en) * 1999-03-31 2008-08-13 Advantest Corporation Particle beam apparatus for tilted observation of a specimen
US6452175B1 (en) * 1999-04-15 2002-09-17 Applied Materials, Inc. Column for charged particle beam device
US6614026B1 (en) * 1999-04-15 2003-09-02 Applied Materials, Inc. Charged particle beam column
US6787772B2 (en) 2000-01-25 2004-09-07 Hitachi, Ltd. Scanning electron microscope

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5851384B2 (ja) * 1976-04-13 1983-11-16 理化学研究所 荷電粒子ビ−ムの偏向方法

Also Published As

Publication number Publication date
JPS58147948A (ja) 1983-09-02

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